Standar Persyaratan Industri Cleanroom
A cleanroom's performance requirements identify the cleanroom class level required at a given state or condition. Persyaratan kinerja Cleanroom mengidentifikasi tingkat kelas Cleanroom yang diperlukan pada kondisi atau kondisi tertentu. There are three level of condition (states) for testing and characterizing the performance of cleanrooms: as-built; Ada tiga level kondisi (kondisi) untuk menguji dan mengkarakterisasi kinerja cleanroom: as-built; at rest; saat istirahat; and operational. dan operasional. Specific test methods for these three classifications are outlined in 14644-3:2005. Metode pengujian khusus untuk ketiga klasifikasi ini diuraikan dalam 14644-3: 2005.
Most cleanrooms are rated and sold in the as-built category—an empty room with the filter system running, but without workers and production equipment. Kebanyakan Cleanroom dinilai dan dijual dalam kategori as-built-kamar kosong dengan sistem filter berjalan, tetapi tanpa pekerja dan peralatan produksi. However, adding workers and equipment will introduce contamination and affect the room rating. Namun, menambah pekerja dan peralatan akan menimbulkan kontaminasi dan mempengaruhi peringkat kamar. A clean room may be rated ISO 6 at rest, but at ISO 7 during operation. Ruang bersih dapat dinilai ISO 6 saat istirahat, tetapi pada ISO 7 selama operasi. To comply with performance requirements, the as-built empty room should be tested and benchmarked, followed by testing and documentation of the at-rest and operational states. Untuk memenuhi persyaratan kinerja, ruang kosong yang dibangun harus diuji dan dijadikan tolok ukur, diikuti dengan pengujian dan dokumentasi keadaan istirahat dan operasional. If contamination in the at-rest or operational states is not in compliance, corrective steps need to be taken. Jika kontaminasi pada kondisi istirahat atau operasional tidak sesuai, langkah-langkah perbaikan perlu diambil. These steps can range from examining the production process and number of workers in the cleanroom, to testing the room's air flow performance. Langkah-langkah ini dapat berkisar dari memeriksa proses produksi dan jumlah pekerja di ruang bersih, hingga menguji kinerja aliran udara ruangan.
In addition, cleanroom air flow performance can be cost-effectively upgraded by adding fan filter modules (FFM). Selain itu, kinerja aliran udara Cleanroom dapat ditingkatkan secara efektif dengan menambahkan modul fan filter (FFM). For example, FFMs cover approximately 5-15% of an ISO 8 Class cleanroom ceiling. Misalnya, FFM mencakup sekitar 5-15% dari langit-langit kamar bersih ISO 8 Class. Upgrading to an ISO 7 cleanroom requires 15-25% ceiling coverage and covering 25-40% of the ceiling changes the room to an ISO 6 Class. Upgrade ke kamar bersih ISO 7 membutuhkan cakupan langit-langit 15-25% dan mencakup 25-40% langit-langit mengubah ruangan menjadi Kelas ISO 6.
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